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NANOMETER-SCALE FABRICATION USING SCANNING PROBE LITHOGRAPHY

Authors :
T. Hashizume
Masayoshi Ishibashi
Midori Kato
S. Heike
Source :
Foundations of Quantum Mechanics in the Light of New Technology.
Publication Year :
2002
Publisher :
WORLD SCIENTIFIC, 2002.

Subjects

Subjects :
Materials science
Fabrication
Scale (ratio)
Nanometre
Nanotechnology
Scanning probe lithography
Next-generation lithography

Details

Database :
OpenAIRE
Journal :
Foundations of Quantum Mechanics in the Light of New Technology
Accession number :
edsair.doi...........978be6201c78ffa4f9fcf2fbc0430d7c
Full Text :
https://doi.org/10.1142/9789812776716_0044
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