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Room Temperature Bonding of Polymer to Glass Wafers using Surface Activated Bonding (SAB) Method

Authors :
Takashi Matsumae
Masashi Nakano
Yoshiie Matsumoto
Ryuichi Kondo
Tadatomo Suga
Source :
ECS Meeting Abstracts. :2991-2991
Publication Year :
2012
Publisher :
The Electrochemical Society, 2012.

Abstract

not Available.

Details

ISSN :
21512043
Database :
OpenAIRE
Journal :
ECS Meeting Abstracts
Accession number :
edsair.doi...........97bd79a326b922e3df7936dcd689d7a5
Full Text :
https://doi.org/10.1149/ma2012-02/40/2991