Back to Search
Start Over
Study on MEMS Capacitive Differential Pressure Sensor
- Source :
- Key Engineering Materials. :968-971
- Publication Year :
- 2014
- Publisher :
- Trans Tech Publications, Ltd., 2014.
-
Abstract
- The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor. The measurement capacitance of the sensors is 5.37 pF at an applied pressure of 0 kPa and 7.26 pF and the full operating range of 40 kPa.The ratio of changed to initial capacitance was 0.35. The error of the MEMS capacitive pressure sensor is less than 4‰ full-scale(FS) by using quadratic curve fitting which can meet most application requirements.
- Subjects :
- Microelectromechanical systems
Materials science
Silicon
business.industry
Mechanical Engineering
Capacitive sensing
Analytical chemistry
chemistry.chemical_element
Capacitive displacement sensor
Pressure sensor
Capacitance
chemistry
Mechanics of Materials
Anodic bonding
Electrode
Optoelectronics
General Materials Science
business
Subjects
Details
- ISSN :
- 16629795
- Database :
- OpenAIRE
- Journal :
- Key Engineering Materials
- Accession number :
- edsair.doi...........9811b900e1cc5576cbc5db6d6beed9d1