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Frequency Trimming Method for a Disk Resonator Using Flexural Rigidity
- Source :
- IEEJ Transactions on Sensors and Micromachines. 141:402-408
- Publication Year :
- 2021
- Publisher :
- Institute of Electrical Engineers of Japan (IEE Japan), 2021.
Details
- ISSN :
- 13475525 and 13418939
- Volume :
- 141
- Database :
- OpenAIRE
- Journal :
- IEEJ Transactions on Sensors and Micromachines
- Accession number :
- edsair.doi...........98cd6bf62a55e72e7a99e4675d5dc90d