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Structure, dielectric properties and energy storage performance of barium strontium titanate thin films prepared by spin-coating technique
- Source :
- 2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM).
- Publication Year :
- 2016
- Publisher :
- IEEE, 2016.
-
Abstract
- Ba 0.4 Sr 0.6 TiO 3 (BST) thin films were prepared by spin-coating technique and deposited on either Pt/TiO 2 /SiO 2 /Si (Pt/Si) substrate or silicon buffered by a lanthanum nickel oxide buffer layer (LNO/Si). X-ray diffraction and scanning electron microscopy showed that the BST films were crack free, compact and crystallized with a single perovskite structure. The effects of bottom electrodes on dielectric properties and energy storage performance of BST films were investigated. The results shows that the dielectric constant of BST/Pt film is a little higher than that of BST/LNO film, and the dielectric loss at 1 kHz of both films is very low
- Subjects :
- 010302 applied physics
Spin coating
Materials science
Silicon
Scanning electron microscope
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
Substrate (electronics)
Dielectric
021001 nanoscience & nanotechnology
01 natural sciences
chemistry
0103 physical sciences
Dielectric loss
Thin film
0210 nano-technology
Layer (electronics)
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM)
- Accession number :
- edsair.doi...........99035fd834963306e75cc7b67e638e7b