Diagnostics of Atmospheric Pressure Surface Discharge Plasmas in Argon

Atmospheric pressure surface discharge is shown to have great prospects for a number of industrial applications. To acquire better results in application fields and considering that the study of the basic parameters including electron temperature and electron density is desirable, we develop an equivalent circuit model and the diagnostic techniques based on optical emission spectroscopy and electrical measurement in our laboratory. The electron temperature has been determined to be about 0.7 eV by a Fermi–Dirac model. The electron density has been calculated to be near 1010cm−3 from a time resolved electrical measurement (Ohmic heating method).