Formation of Aluminum Nitride by the Reaction Between Aluminum Oxide Nitrogen Plasma Jet

Subjects

Subjects :

Jet (fluid)
Materials science
chemistry
Chemical engineering
Aluminium
Nitrogen plasma
chemistry.chemical_element
Nitride
Aluminum oxide

Details

ISSN :

24355666 and 00134678

Volume :

36

Database :

OpenAIRE

Journal :

Journal of The Electrochemical Society of Japan

Accession number :

edsair.doi...........9a9398d97490be484c343c35fa685a17