Cite
Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF–RF system using different precursor gases
MLA
G. Fedosenko, et al. “Diamond-like Carbon Film Deposition by a 13.56 MHz Hollow Cathode RF–RF System Using Different Precursor Gases.” Surface and Coatings Technology, July 2001, pp. 693–97. EBSCOhost, https://doi.org/10.1016/s0257-8972(01)01104-5.
APA
G. Fedosenko, D. Korzec, A. Schwabedissen, & J. Engemann. (2001). Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF–RF system using different precursor gases. Surface and Coatings Technology, 693–697. https://doi.org/10.1016/s0257-8972(01)01104-5
Chicago
G. Fedosenko, D. Korzec, A. Schwabedissen, and J. Engemann. 2001. “Diamond-like Carbon Film Deposition by a 13.56 MHz Hollow Cathode RF–RF System Using Different Precursor Gases.” Surface and Coatings Technology, July, 693–97. doi:10.1016/s0257-8972(01)01104-5.