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Evaluation Method of Precipitated Oxygen Concentration in Low Resistivity Silicon Wafers Using X-Ray Diffration

Authors :
Michihiro Mizuno
Hiroshi Takeno
Takao Takenaka
Satoshi Ushio
Source :
Materials Science Forum. :1865-1870
Publication Year :
1995
Publisher :
Trans Tech Publications, Ltd., 1995.

Subjects

Subjects :
Materials science
Silicon
Mechanical Engineering
Analytical chemistry
X-ray
chemistry.chemical_element
Condensed Matter Physics
law.invention
Oxygen precipitation
Crystallography
Magazine
chemistry
Mechanics of Materials
law
Electrical resistivity and conductivity
Evaluation methods
General Materials Science
Wafer
Limiting oxygen concentration

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........9b3396c19c26d3b6d174a78991b29a53
Full Text :
https://doi.org/10.4028/www.scientific.net/msf.196-201.1865
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