Study on Non-Thermal Ablation Process of Silica Glass Using Laser Plasma Soft X-rays toward Nanomachining

Authors :: Hiroyuki Niino
Shuichi Torii
Kouichi Murakami
Takashige Fujimori
Tetsuya Makimura
Source :: IEEJ Transactions on Electronics, Information and Systems. 129:1186-1191
Publication Year :: 2009
Publisher :: Institute of Electrical Engineers of Japan (IEE Japan), 2009.

Subjects :: Materials science
Silica glass
business.industry
medicine.medical_treatment
Thermal ablation
Soft X-rays
Plasma
Ablation
Laser
Mass spectrometry
law.invention
law
Scientific method
medicine
Optoelectronics
Electrical and Electronic Engineering
business

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