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P‐11.9: Study on process conditions of planarization layer in FFS mode using a‐IGZO TFTs
- Source :
- SID Symposium Digest of Technical Papers. 50:927-929
- Publication Year :
- 2019
- Publisher :
- Wiley, 2019.
Details
- ISSN :
- 21680159 and 0097966X
- Volume :
- 50
- Database :
- OpenAIRE
- Journal :
- SID Symposium Digest of Technical Papers
- Accession number :
- edsair.doi...........9c3b2127a90cb52b2a72523a2fc63a66