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Wafer Surface Contamination Reduction from Silicon Carbide Components at Elevated Temperatures

Authors :
Igor Rapoport
Patrick Taylor
Joel Kearns
Yeshwanth Narendar
Source :
ECS Meeting Abstracts. :782-782
Publication Year :
2006
Publisher :
The Electrochemical Society, 2006.

Abstract

not Available.

Details

ISSN :
21512043
Database :
OpenAIRE
Journal :
ECS Meeting Abstracts
Accession number :
edsair.doi...........9cd19873d902c2dc013faeac22a46d79

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