Broadband optical monitoring of optical thin films in large ion-beam sputtering machine

Authors :: L. Pinard
Gianpietro Cagnoli
Laurent Balzarini
Eleonore Barthelemy-Mazot
B. Lagrange
David Jonathan Hofman
Bertrand David
Christophe Michel
B. Sassolas
Julien Teillon
Source :: Optical Interference Coatings 2016.
Publication Year :: 2016
Publisher :: OSA, 2016.
Abstract: A real-time optical monitoring of coated thin films is being installed in a large coating machine. An optical system and a coating simulation software were developped, predicting the success rate of the deposition.

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