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Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction

Authors :
Kazuyuki Kuroyama
Boqi Qiu
Ryoka Kondo
Naomi Nagai
Kazuhiko Hirakawa
Tianye Niu
Ya Zhang
Source :
2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz).
Publication Year :
2019
Publisher :
IEEE, 2019.

Abstract

Utilizing a thermomechanical transduction scheme, we have developed an uncooled, sensitive, and fast THz bolometer by using a doubly clamped GaAs MEMS beam resonator as a sensitive thermistor. Owing to its ultra-high temperature sensitivity (the noise equivalent temperature difference of ~1 µK/ ✓ Hz), the present bolometer achieves not only a high sensitivity but also an operation bandwidth of several kHz, which is ~100 times faster than other uncooled THz thermal sensors. The MEMS bolometers are fabricated by the standard semiconductor fabrication processes and are well suited for making detector arrays for realizing THz cameras.

Details

Database :
OpenAIRE
Journal :
2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Accession number :
edsair.doi...........9d4fe7bf7af55fb6e2ccc9188721af56
Full Text :
https://doi.org/10.1109/irmmw-thz.2019.8873848