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Exploring Pore Formation of Atomic Layer-Deposited Overlayers by in Situ Small- and Wide-Angle X-ray Scattering
- Source :
- Chemistry of Materials. 28:7082-7087
- Publication Year :
- 2016
- Publisher :
- American Chemical Society (ACS), 2016.
-
Abstract
- In this work, we explore the pore structure of overcoated materials by in situ synchrotron small-angle (SAXS) and wide-angle X-ray scattering (WAXS). Thin films of aluminum oxide (Al2O3) and titanium dioxide (TiO2) with thicknesses of 4.9 and 2.5 nm, respectively, are prepared by atomic layer deposition (ALD) on nonporous nanoparticles. In situ X-ray measurements reveal that porosity is induced in the ALD films by annealing the samples at high temperatures. Moreover, this pore formation can be attributed to densification resulting from an amorphous to crystalline phase transition of the ALD films as confirmed by high-resolution X-ray diffraction and the pair distribution function. Simultaneous SAXS and WAXS results show not only that the porosity is formed by the phase transition but also that the pore size increases with temperature.
- Subjects :
- Materials science
Small-angle X-ray scattering
Annealing (metallurgy)
General Chemical Engineering
Nanoparticle
02 engineering and technology
General Chemistry
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
Amorphous solid
Crystallography
Atomic layer deposition
Chemical engineering
Materials Chemistry
Thin film
0210 nano-technology
Porosity
Wide-angle X-ray scattering
Subjects
Details
- ISSN :
- 15205002 and 08974756
- Volume :
- 28
- Database :
- OpenAIRE
- Journal :
- Chemistry of Materials
- Accession number :
- edsair.doi...........9d6326e594c882e0f57f854ddf435b74