Effects of ultrasonic amplitude on sapphire ultrasonic vibration assisted chemical mechanical polishing by experimental and CFD method

Authors :: Wenhu Xu
Min Zhong
Mufang Zhou
Source :: Mechanics of Advanced Materials and Structures. 29:7086-7103
Publication Year :: 2021
Publisher :: Informa UK Limited, 2021.
Abstract: Sapphire possesses chemically inert and high hardness. Therefore, it is difficult to get idea material removal rate (MRR) and low surface roughness through chemical mechanical polishing (CMP). Ultr...

Subjects :: Inert
Materials science
business.industry
Mechanical Engineering
General Mathematics
Computational fluid dynamics
Amplitude
Mechanics of Materials
Chemical-mechanical planarization
Cavitation
Sapphire
Surface roughness
General Materials Science
Ultrasonic sensor
Composite material
business
Civil and Structural Engineering

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