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Study on loss of performance in inertial sensors due to electrode asymmetry
- Source :
- Chinese Optics. 12:455-462
- Publication Year :
- 2019
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2019.
Details
- ISSN :
- 20951531
- Volume :
- 12
- Database :
- OpenAIRE
- Journal :
- Chinese Optics
- Accession number :
- edsair.doi...........9ecb9cd0116ae6a60f278404ca2b9541