Back to Search Start Over

Design and fabrication of silicon-based optical phased array

Authors :
Zhiqiang Qi
Wenliang Hu
Haocheng Sun
Source :
AOPC 2021: Micro-optics and MOEMS.
Publication Year :
2021
Publisher :
SPIE, 2021.

Subjects

Subjects :
Materials science
Fabrication
Phased-array optics
business.industry
Optoelectronics
business
Silicon based

Details

Database :
OpenAIRE
Journal :
AOPC 2021: Micro-optics and MOEMS
Accession number :
edsair.doi...........9ff8d2f3ce131a7b1de24d51d93651a6

Tools

Authors Abstract Subjects Details