Experimental investigation for optimizing the fabrication of a sapphire capillary using femtosecond laser machining and diamond tool micromilling

Sapphire capillaries manufactured with high efficiency and precision are needed for use in laser–plasma accelerators. A hybrid manufacturing process combining femtosecond laser machining and diamond tool micromilling was applied. By using a femtosecond laser mounted on a 5-axis machine, a capillary with a groove width of 630 µm and length of 90 mm was fabricated on a sapphire plate within 5 h. The surface roughness of the bottom of the cylinder groove was finished to 7.1 nm in Sa by milling with a polycrystalline diamond end mill.