Fabrication of Complex Micro Channel Systems Inside Optically-Transparent 3D Substrates by Laser Processing

A novel process technology was developed to create 3D micro channel systems bounded by solid 3D quartz substrates without damaging the bounding surfaces of the substrate. The process uses a Nd:YAG laser to induce thermal energy or plasma to micromachine channels in substrates which are transparent to Nd:YAG laser wavelength. We have demonstrated that this process is capable of fabricating up 4mm long circular cross-section channels with diameters ranging from 25 to 200 microns. The channel diameter can be controlled by a software program that interfaces with the laser system, thus allowing complete channel systems to be designed on a CAD software and then directly fabricated by a laser system. The process technology, process characterization, and initial test results of the fabricated micro channels are presented in this paper.