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Computer simulated sputtering of polycrystalline targets by 40 keV argon ions
- Source :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :109-113
- Publication Year :
- 1987
- Publisher :
- Elsevier BV, 1987.
-
Abstract
- Sputtering of copper, nickel and alumium polycrystalline targets by 40 keV Ar + ions is simulated by a NIARLOWE-based computer code. Angle-of-incidence dependence of sputtering yields and depth-of-origin distributions are calculated. The angular distributions and energy spectra of sputtered particles are similar to those found earlier for low-energy sputtering.
- Subjects :
- Nuclear and High Energy Physics
Materials science
Argon
Physics::Instrumentation and Detectors
chemistry.chemical_element
Copper
Spectral line
Computer Science::Other
Ion
Condensed Matter::Materials Science
Nickel
chemistry
Physics::Plasma Physics
Sputtering
Crystallite
Atomic physics
Instrumentation
Subjects
Details
- ISSN :
- 0168583X
- Database :
- OpenAIRE
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Accession number :
- edsair.doi...........a1bcf0d1311c96494d5ef16b19591229
- Full Text :
- https://doi.org/10.1016/s0168-583x(87)80023-x