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Gate Stack Technology

Authors :
Hiroshi Iwai
Kuniyuki Kakushima
Takamasa Kawanago
Source :
Hyomen Kagaku. 33:600-609
Publication Year :
2012
Publisher :
Surface Science Society Japan, 2012.

Subjects

Subjects :
chemistry.chemical_compound
Materials science
chemistry
Stack (abstract data type)
business.industry
MOSFET
Gate stack
Oxide
Optoelectronics
business
Metal gate
Gate equivalent

Details

ISSN :
18814743 and 03885321
Volume :
33
Database :
OpenAIRE
Journal :
Hyomen Kagaku
Accession number :
edsair.doi...........a3c734d94c96307258ca56424a30a200

Tools

Authors Abstract Subjects Details