Laser Ablation: Towards Advanced Industrial Solar Cell Metallization Processes

26th European Photovoltaic Solar Energy Conference and Exhibition; 1691-1693
For high efficiency industrial silicon solar cells, Cu based contacts are very promising, in order to reduce shadow losses, series resistance losses, and to improve the contact resistance to the emitter. In this perspective laser ablation is a fast and cost-effective technique to open the SiNx anti-reflection-coating (ARC). In this paper we study the laser ablation damage to the emitter by SEM and optical microscopy, and SunsVoc characterization. Finally we compare the solar cells performance of Ti/Cu contacting schemes using (1) line contact ablation (2) point contact ablation with a reference process (3) where wet etching is used to structure the SiNx ARC layer.