Wet chemical spray etching of the copper film for the application to chip on film in display devices

Authors :: Do Kyung Lee
Source :: Molecular Crystals and Liquid Crystals. 735:120-125
Publication Year :: 2021
Publisher :: Informa UK Limited, 2021.
Abstract: For achieving the fine pitch chip-on-film (COF) in display devices, wet chemical spray etching behaviors of the copper (Cu) films in the etching solutions with different cupric chloride (CuCl2) and...

Subjects :: Materials science
Fine pitch
chemistry.chemical_element
General Chemistry
Condensed Matter Physics
Copper
Display device
Chemical engineering
chemistry
Etching (microfabrication)
Cupric chloride
Chemical spray
General Materials Science
Chip on film

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