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Methodology for thermal budget reduction of SPER down to 450 °C for 3D sequential integration
- Source :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 370:14-18
- Publication Year :
- 2016
- Publisher :
- Elsevier BV, 2016.
-
Abstract
- 3D sequential integration enables the full use of the third dimension thanks to its unique contact density far above the possibilities of 3D packaging solutions. However, as the transistors are sequentially stacked over each other, the thermal budget allowed for the fabrication of the top transistor is limited by the maximal temperature accepted by the already made bottom one. It was previously described that a thermal budget of T > 500 °C is enough to degrade the bottom transistors performance. So the technological challenge is to develop low temperature routines for the fabrication of the top devices. For that, different processes have to be adapted, mainly the dopant activation step, where the T > 1000 °C spike annealing must be replaced. In this contribution, we present the feasibility to dope by solid phase epitaxial regrowth (SPER) at 450 °C thin Si films (22 nm) containing high dopant concentration of 5 × 10 20 at/cm 3 . For n- and p-type dopants, the 450 °C SPER rendered low sheet resistance values, as low as the ones obtained with the high temperature activation method.
- Subjects :
- 010302 applied physics
Nuclear and High Energy Physics
Materials science
Fabrication
Dopant
Annealing (metallurgy)
business.industry
Transistor
Doping
Nanotechnology
02 engineering and technology
Dopant Activation
021001 nanoscience & nanotechnology
01 natural sciences
law.invention
Ion implantation
law
0103 physical sciences
Optoelectronics
0210 nano-technology
business
Instrumentation
Sheet resistance
Subjects
Details
- ISSN :
- 0168583X
- Volume :
- 370
- Database :
- OpenAIRE
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Accession number :
- edsair.doi...........a4be005652f21d0023c89445c809962b