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Visible Laser Probing (VLP) with GaP Solid Immersion Lens Demonstrating 110 nm Resolution in Common Laser Probing Applications

Authors :
Patrick Pardy
Travis Eiles
Source :
International Symposium for Testing and Failure Analysis.
Publication Year :
2016
Publisher :
ASM International, 2016.

Abstract

This paper demonstrates a breakthrough method of visible laser probing (VLP), including an optimized 577 nm laser microscope, visible-sensitive detector, and an ultimate-resolution gallium phosphide-based solid immersion lens on the 10 nm node, showing a 110 nm resolution. This is 2x better than what is achieved with the standard suite of probing systems using typical infrared (IR) wavelengths today. Since VLP provides a spot diameter reduction of 0.5x over IR methods, it is reasonable, based simply on geometry, to project that VLP using the 577 nm laser will meet the industry needs for laser probing for both the 10 nm and 7 nm process nodes. Based on its high level of optimization, including high resolution and specialized solid immersion lens, it is highly likely that this VLP technology will be one of the last optically-based fault isolation methods successfully used.

Details

ISSN :
08901740
Database :
OpenAIRE
Journal :
International Symposium for Testing and Failure Analysis
Accession number :
edsair.doi...........a653f21dc6c08119daae325ad860ba18
Full Text :
https://doi.org/10.31399/asm.cp.istfa2016p0027