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Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

Authors :
Xiao-liang Zhang
Xiao-Chun Li
Hui-jing Guo
Source :
Optoelectronics Letters. 12:241-244
Publication Year :
2016
Publisher :
Springer Science and Business Media LLC, 2016.

Abstract

A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.

Details

ISSN :
19935013 and 16731905
Volume :
12
Database :
OpenAIRE
Journal :
Optoelectronics Letters
Accession number :
edsair.doi...........a6aacadffdca3ab29e7811fcea8bd21f
Full Text :
https://doi.org/10.1007/s11801-016-6097-z