A 125-KHZ CMOS-MEMS Resoswitch Embedded Zero Quiescent Power OOK/FSK Receiver

This paper demonstrates a 125-kHz micromechanical resoswitch-embedded zero quiescent power OOK/FSK communication receiver based on a CMOS-MEMS fabrication platform for low-frequency (LF) active RFID standby receiver applications. In particular, differing from the previously demonstrated receiver using a CMOS-incompatible Au fabrication process [1], this work utilizes a standard $0.35-\mu \mathrm{m}$ CMOS process to achieve a folded-beam comb-driven resoswitch with a digital decoder. Enabled by the key component of the resoswitch, the receiver realizes on-chip signal filtering, power amplification, and demodulation, all together consuming an averaged $10.46\ \mu\mathrm{W}$ when processing “1” and zero power for “0” and at standby. This demonstration verifies the efficacy of using low-cost, high-fidelity CMOS processes towards all-mechanical resoswitch-based RF applications.