Metallization in a-Si:H TFT Array Fabrication — Deposition and Wet Etching of Conductors

Subjects

Subjects :

Materials science
Fabrication
Thin-film transistor
business.industry
Electronic engineering
Optoelectronics
Reactive-ion etching
business
Deposition (chemistry)
Electrical conductor

Details

ISBN :

978-1-4020-7504-9

ISBNs :

9781402075049

Database :

OpenAIRE

Journal :

Thin Film Transistors ISBN: 9781402075049, Thin Film Transistors

Accession number :

edsair.doi...........a875be0d44b0b1d7388d64e71e6a5354

Full Text :

https://doi.org/10.1007/978-1-4615-0397-2_8