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Novel High Thermal Resistance Structure Design for Responsivity and Detectivity Enhancements of Cmos Mems Thermoelectric Infrared Sensor
- Source :
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
- Accession number :
- edsair.doi...........a88c061b4748f0d5e28d28611df43090
- Full Text :
- https://doi.org/10.1109/mems51670.2022.9699438