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FBAR Sensor Array for in Liquid Operation
- Source :
- IEEE Sensors Journal. 10:1903-1904
- Publication Year :
- 2010
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2010.
-
Abstract
- This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.
Details
- ISSN :
- 15581748 and 1530437X
- Volume :
- 10
- Database :
- OpenAIRE
- Journal :
- IEEE Sensors Journal
- Accession number :
- edsair.doi...........ace8b3c8cb27c18c2e1138d766893431
- Full Text :
- https://doi.org/10.1109/jsen.2010.2051944