Large format next generation microshutter arrays for UV/Visible spectroscopy

We are presenting the result of the microshutter arrays for multi-object spectroscopy. Microshutter arrays are MEMS technology devices that are 2D programmable field masks for object selection in the sparsely populated fields. This next generation microshutters are based on the first generation of the microshutter arrays developed for the James Webb Space Telescope Near-Infrared Spectrometer (JWST NIRSpec) we developed new fabrication process that allowed to build fully electrostatic microshutter arrays. The microshutter arrays based on this new development have been successfully demonstrated in the FORTIS project sounding rocket flight. We are currently in the process of expanding the fabrication process to large format microshutter arrays designed for the use on the future NASA flagship missions such as HabEx and LUVOIR.