Growth of 2-Inch Wafer-Scale Uniform Vanadium Dioxide Thin Films Using Radio-Frequency Sputtering System and Characteristics of Their Metal-Insulator Transition

Authors :: Kaleem Abbas
Muhammad Sabbtain Abbas
Ji Hoon Kang
Dae Joon Kang
Min Kyun Sohn
Ga Ram Bae
Source :: Science of Advanced Materials. 10:1171-1178
Publication Year :: 2018
Publisher :: American Scientific Publishers, 2018.

Subjects :: Vanadium dioxide
Materials science
Scale (ratio)
business.industry
Optoelectronics
General Materials Science
Wafer
Metal–insulator transition
Thin film
business
Radio frequency sputtering

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