High dose arsenic implantation of silicon

MLA

H.I. Budinov, and Dimitre Karpuzov. “High Dose Arsenic Implantation of Silicon.” Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 73, Mar. 1993, pp. 352–56. EBSCOhost, https://doi.org/10.1016/0168-583x(93)95750-y.

APA

H.I. Budinov, & Dimitre Karpuzov. (1993). High dose arsenic implantation of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 73, 352–356. https://doi.org/10.1016/0168-583x(93)95750-y

Chicago

H.I. Budinov, and Dimitre Karpuzov. 1993. “High Dose Arsenic Implantation of Silicon.” Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 73 (March): 352–56. doi:10.1016/0168-583x(93)95750-y.