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Comparing Different Output Metrics of High-Resolution MEMS Weakly Coupled Resonant Tilt Sensors
- Source :
- IEEE Sensors Journal. 23:6616-6627
- Publication Year :
- 2023
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2023.
- Subjects :
- Electrical and Electronic Engineering
Instrumentation
Subjects
Details
- ISSN :
- 23799153 and 1530437X
- Volume :
- 23
- Database :
- OpenAIRE
- Journal :
- IEEE Sensors Journal
- Accession number :
- edsair.doi...........adc97891717f94ca24c10e80042ab8bf