A Novel Structure of Slot-Antenna Array for Producing Large-Area Planar Surface-Wave Plasmas

The principle of surface wave plasma discharge in a rectangular cavity is introduced and the distribution of the electromagnetic field within a rectangular waveguide is analysed. A novel structure of a slot antenna array is presented. In comparison with the traditional slotantenna, it is shown that the designed slot antenna array can excite effectively the surface wave coupling into the chamber, and generate a stable large-area high-density plasma. These results are useful for exploring the optimized design of the slot-antenna for surface wave plasmas.