Lithium Niobate Film Based Acoustic Wave Resonator with Arc Shaped Electrodes

In this paper, we demonstrate a first-order antisymmetric (A1) mode z-cut LiNbO 3 thin film resonator with arc shaped electrode. Arc shaped electrodes are only adopted on the top of the LiNbO 3 thin film piezoelectric material, and the positive and negative voltage is applied alternately to excite A1 mode in the piezoelectric layer. Some parametric finite element simulations are also presented in this paper. We simulated and fabricated the resonators operating at 6 GHz with an electromechanical coupling coefficient ( $K^{2}{_{eff}}$ ) of 17.97% and extracted quality factor (Q) of 975. This achievement provides a potential solution to satisfy the needs of high frequency and large bandwidth.