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Models of Bifurcation and Gravity Induced Deflection in Wide Band Gap 4H-SiC Semiconductor Wafers

Authors :
Vincenzo Vinciguerra
Giuseppe Luigi Malgioglio
Antonio Landi
Marco Renna
Source :
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Accession number :
edsair.doi...........af18c1431c7446d91ec5276cef1567fc
Full Text :
https://doi.org/10.1109/eurosime56861.2023.10100763