Dielectric properties of sub 20 nm homoepitaxial SrTiO3 thin film grown by molecular beam epitaxy using oxygen plasma

Authors :: Young-Nam Kwon
Na Byunghoon
Jungmin Park
Myoungho Jeong
Han-jin Lim
Euijoon Yoon
Beom-jong Kim
Source :: Ferroelectrics. 571:76-84
Publication Year :: 2021
Publisher :: Informa UK Limited, 2021.
Abstract: Epitaxial SrTiO 3 thin films were grown by molecular beam epitaxy (MBE) using an oxygen plasma source. SrO and TiO2 layers were alternately deposited on 0.5 wt% (001) Nb doped SrTiO3 substrates who...

Subjects :: 010302 applied physics
Materials science
business.industry
02 engineering and technology
Dielectric
021001 nanoscience & nanotechnology
Condensed Matter Physics
Epitaxy
01 natural sciences
Electronic, Optical and Magnetic Materials
Nb doped
Molecular beam epitaxial growth
0103 physical sciences
Oxygen plasma
Optoelectronics
Thin film
0210 nano-technology
business
Molecular beam epitaxy

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