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Dielectric properties of sub 20 nm homoepitaxial SrTiO3 thin film grown by molecular beam epitaxy using oxygen plasma
- Source :
- Ferroelectrics. 571:76-84
- Publication Year :
- 2021
- Publisher :
- Informa UK Limited, 2021.
-
Abstract
- Epitaxial SrTiO 3 thin films were grown by molecular beam epitaxy (MBE) using an oxygen plasma source. SrO and TiO2 layers were alternately deposited on 0.5 wt% (001) Nb doped SrTiO3 substrates who...
- Subjects :
- 010302 applied physics
Materials science
business.industry
02 engineering and technology
Dielectric
021001 nanoscience & nanotechnology
Condensed Matter Physics
Epitaxy
01 natural sciences
Electronic, Optical and Magnetic Materials
Nb doped
Molecular beam epitaxial growth
0103 physical sciences
Oxygen plasma
Optoelectronics
Thin film
0210 nano-technology
business
Molecular beam epitaxy
Subjects
Details
- ISSN :
- 15635112 and 00150193
- Volume :
- 571
- Database :
- OpenAIRE
- Journal :
- Ferroelectrics
- Accession number :
- edsair.doi...........af388a4e54015856108fe7839e538970