In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners

MLA

Zhiyong Chen, et al. “In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners.” 2019 IEEE SENSORS, Oct. 2019. EBSCOhost, https://doi.org/10.1109/sensors43011.2019.8956836.

APA

Zhiyong Chen, Mokrane Boudaoud, Stephane Regnier, Ali Bazaei, & Massoud Hemmasian Ettefagh. (2019). In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners. 2019 IEEE SENSORS. https://doi.org/10.1109/sensors43011.2019.8956836

Chicago

Zhiyong Chen, Mokrane Boudaoud, Stephane Regnier, Ali Bazaei, and Massoud Hemmasian Ettefagh. 2019. “In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners.” 2019 IEEE SENSORS, October. doi:10.1109/sensors43011.2019.8956836.