Simulation of a Sensitive Element of a Sandwich Structure of a Capacitive Micromechanical Accelerometer Based on the Dielectric Constant Changes

Authors :: Sergey P. Timoshenkov
Boris M. Simonov
Ye Ko Ko Aung
Source :: Proceedings of Universities. Electronics. 25:155-166
Publication Year :: 2020
Publisher :: National Research University of Electronic Technology (MIET), 2020.

Subjects :: Materials science
Capacitive sensing
Structure (category theory)
Dielectric
Composite material
Element (category theory)
Accelerometer
Microbiology

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