Study on wet etching of dummy polysilicon in narrow pattern gap using alkaline solution

Subjects

Subjects :

Mechanics of Materials
Mechanical Engineering
General Materials Science
Condensed Matter Physics

Details

ISSN :

13698001

Volume :

143

Database :

OpenAIRE

Journal :

Materials Science in Semiconductor Processing

Accession number :

edsair.doi...........b05924fbc2de9a7b4a6c81e83de4527c

Full Text :

https://doi.org/10.1016/j.mssp.2022.106561