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Directed self-assembly patterning for forming fin field effect transistors
- Source :
- SPIE Newsroom.
- Publication Year :
- 2016
- Publisher :
- SPIE-Intl Soc Optical Eng, 2016.
Details
- ISSN :
- 18182259
- Database :
- OpenAIRE
- Journal :
- SPIE Newsroom
- Accession number :
- edsair.doi...........b0f7f1588d44e7df8463769208c909dc
- Full Text :
- https://doi.org/10.1117/2.1201606.006519