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Design of High Speed and Torque Ripple Reduction of Motors for Semiconductor CVD Process
- Source :
- THE TRANSACTION OF THE KOREAN INSTITUTE OF ELECTRICAL ENGINEERS P. 71:255-261
- Publication Year :
- 2022
- Publisher :
- The Korean Institute of Electrical Engineers, 2022.
Details
- ISSN :
- 25867792 and 1229800X
- Volume :
- 71
- Database :
- OpenAIRE
- Journal :
- THE TRANSACTION OF THE KOREAN INSTITUTE OF ELECTRICAL ENGINEERS P
- Accession number :
- edsair.doi...........b1a8f85da6638ae67410d700bb171e52