Photoluminescence imaging of luminous paint for surface temperature monitoring

Temperature monitoring is essentially important for stable control of fabrication processes. In order to develop a convenient 2-dimensional temperature monitoring system using a thermo-paint, photoluminescence (PL) images are observed from the luminous paints at various temperatures. Commercially available and in-house modified luminous paints are evaluated for improving temperature sensitivity and stability of the thermo-paints. Temperature dependences of PL images from various luminous paints are reported for developing temperature monitoring procedure using a thermo-paint.