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High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel
- Source :
- Surface and Coatings Technology. 355:129-135
- Publication Year :
- 2018
- Publisher :
- Elsevier BV, 2018.
-
Abstract
- This paper presents the results of the formation of deep modified layers in AISI 5140 alloy steel using a high-intensity repetitively pulsed nitrogen ion beam. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at various temperatures ranging from 450 to 650 °C with 1.2 keV nitrogen ions using a very-high current density up to 0.5 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified AISI 5140 alloy steel after 60 min of low ion energy, very-high-intensity nitrogen ion beam implantation.
- Subjects :
- Materials science
Ion beam
Alloy steel
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
engineering.material
01 natural sciences
law.invention
Ion
Physics::Plasma Physics
law
0103 physical sciences
Materials Chemistry
010302 applied physics
Pulse duration
Surfaces and Interfaces
General Chemistry
Plasma
Hot cathode
021001 nanoscience & nanotechnology
Condensed Matter Physics
Nitrogen
Surfaces, Coatings and Films
chemistry
engineering
0210 nano-technology
Current density
Subjects
Details
- ISSN :
- 02578972
- Volume :
- 355
- Database :
- OpenAIRE
- Journal :
- Surface and Coatings Technology
- Accession number :
- edsair.doi...........b399656dfebfb487d763bf36cb77388a