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UV nanoimprint lithography with rigid polymer molds
- Source :
- Microelectronic Engineering. 86:661-664
- Publication Year :
- 2009
- Publisher :
- Elsevier BV, 2009.
-
Abstract
- Transparent polymers are considered as alternative low-cost mold materials in UV nanoimprint lithography (UV-NIL). Here, we demonstrate a nanoimprint process with molds made of rigid polymers novel for this application. These polymer molds are found to show high performance in the patterning with UV-NIL. Sub-50nm structures were fabricated with this process.
- Subjects :
- chemistry.chemical_classification
Materials science
Nanotechnology
Polymer
Condensed Matter Physics
medicine.disease_cause
Atomic and Molecular Physics, and Optics
Plastomer
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
Nanoimprint lithography
Nanolithography
chemistry
law
Mold
medicine
Hot embossing
Electrical and Electronic Engineering
Photolithography
Embossing
Subjects
Details
- ISSN :
- 01679317
- Volume :
- 86
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi...........b3f8600fd22020ccea44ae57001b5c6e