The role of plasma analytics in leading-edge semiconductor technologies

Authors :: Stefan E. Schulz
Norbert Lang
Sven Zimmermann
Jürgen Röpcke
Thomas Otto
M. Haase
Source :: Contributions to Plasma Physics. 58:367-376
Publication Year :: 2018
Publisher :: Wiley, 2018.

Subjects :: 010302 applied physics
Leading edge
Materials science
Plasma etching
business.industry
02 engineering and technology
Plasma
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Semiconductor
Analytics
0103 physical sciences
Optoelectronics
Plasma diagnostics
0210 nano-technology
business
Plasma processing

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