MEMS Mirror for Low Cost Laser Scanners

Authors :: Joachim Janes
Ulrich Hofmann
Source :: Advanced Microsystems for Automotive Applications 2011 ISBN: 9783642213809
Publication Year :: 2011
Publisher :: Springer Berlin Heidelberg, 2011.
Abstract: The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning.

Subjects :: Microelectromechanical systems
Engineering
Laser scanning
business.industry
Aperture
Chip size
Tripod (photography)
Laser
Computer Science::Other
law.invention
Optics
Lidar
law
Scanning mirror
business

ISBN :: 978-3-642-21380-9
ISBNs :: 9783642213809
Database :: OpenAIRE
Journal :: Advanced Microsystems for Automotive Applications 2011 ISBN: 9783642213809
Accession number :: edsair.doi...........b57f9ddb4554986306a2ee05454be489
Full Text :: https://doi.org/10.1007/978-3-642-21381-6_16