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Vertical N-Type and P-Type Nanosheet FETs With C-Shaped Channel
- Source :
- IEEE Transactions on Electron Devices. 70:1380-1385
- Publication Year :
- 2023
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2023.
- Subjects :
- Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Subjects
Details
- ISSN :
- 15579646 and 00189383
- Volume :
- 70
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Electron Devices
- Accession number :
- edsair.doi...........b61e651ec2c0bbc4064acdf284dda71b
- Full Text :
- https://doi.org/10.1109/ted.2023.3239048