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Vertical N-Type and P-Type Nanosheet FETs With C-Shaped Channel

Details

ISSN :
15579646 and 00189383
Volume :
70
Database :
OpenAIRE
Journal :
IEEE Transactions on Electron Devices
Accession number :
edsair.doi...........b61e651ec2c0bbc4064acdf284dda71b
Full Text :
https://doi.org/10.1109/ted.2023.3239048